Novosibirsk State University Journal of Information Technologies
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ISSN 2410-0420 (Online), ISSN 1818-7900 (Print)

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All Issues >> Contents: Volume 15, Issue No 3 (2017)

Automated System of Collection and Visualization of Technological Data in Production of Semiconductor Devices
A. L. Khusnullina, O. B. Voskoboynikova

Tomsk Polytechnic University

DOI: DOI 10.25205/1818-7900-2017-15-3-100-110
UDC code: 621.382.049.77

The description of system of support of lifecycle in production of semiconductor plates is provided. The automated system of collection and visualization of technological parameters is used for control and production management of chips. It is developed as set of two subsystems – interactive expert system with the single database and subsystems of creation of schedules. The subsystem of schedules is used for routing of lots, and by means of expert system operators control the production technology. This system consists of several independent programs started in real time and which are constantly transmitting their results to the relational database. Purpose of programs can be various. In developed system programs of visualization of data, parameters of technological transactions, quality managements by means of simple instruments of quality control are applied. The flexible interactive subsystem of creation of schedules allows to make changes to the sequence of technological transactions and to quickly display results while the subsystem of interpretation of data is more open for integration into new modules and is capable to classify and diagnose better large volumes of information from production of plates. The system is rather effectively designed thanks to the fact that the integrated production environment joins interaction with the user, algorithmic data processing, representation of knowledge, the explanation of opportunities and high-speed access to system.

Key Words
information system, production cycle, automated control system for production, production of semiconductor devices, integrated chip

How to cite:
Khusnullina A. L., Voskoboynikova O. B. Automated System of Collection and Visualization of Technological Data in Production of Semiconductor Devices // Vestnik NSU Series: Information Technologies. - 2017. - Volume 15, Issue No 3. - P. 100-110. - DOI 10.25205/1818-7900-2017-15-3-100-110. - ISSN 1818-7900. (in Russian).

Full Text in Russian

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Publication information
Main title Vestnik NSU Series: Information Technologies, Volume 15, Issue No 3 (2017).
Parallel title: Novosibirsk State University Journal of Information Technologies Volume 15, Issue No 3 (2017).

Key title: Vestnik Novosibirskogo gosudarstvennogo universiteta. Seriâ: Informacionnye tehnologii
Abbreviated key title: Vestn. Novosib. Gos. Univ., Ser.: Inf. Tehnol.
Variant title: Vestnik NGU. Seriâ: Informacionnye tehnologii

Year of Publication: 2017
ISSN: 1818-7900 (Print), ISSN 2410-0420 (Online)
Publisher: Novosibirsk State University Press
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